From Fluid Handling to Dose Control: How Valve Technology Evolved from Process Component to Dose-Control Enabler

As device architectures shrink and move into 3D, the process windows for atomic layer processes have narrowed to the point where valve performance has become a system-level concern. Jeff DeWitt of Swagelok traces how semiconductor fluid systems have evolved through three eras, purity, performance and precision, each driven by the industry’s most pressing process challenge at the time. The post From Fluid Handling to Dose Control: How Valve Technology Evolved from Process Component to Dose-Contro